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By Martin Bögner, Theodor Doll (auth.), Theodor Doll (eds.)

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Wolkenstein, W. B. Sandomirski, Dokl. Acad. Nauk. SSSR, 1I8, 980-982, 1958 [14] [15] [16] [17] [18] [19] Y. G. Barn, F. Wolkenstein, Dokl. Acad. Nauk. Mark, J. Phys. Chern. M. Kogan, Adsorbed Particle Statistics in Electronic Theory of Chemisorption, J. Fiz. Chim. 33, 156, 1959, cited from Russian in: H. Geistlinger, Accumulation layer model for Ga203 thin film, Sens. Act. S. Davids, A. L. Smith, J. Appl. Phys. R. M. Sze, Semiconductor Devices, Physics and Technology, J. Y. 1985 [20] [21] [22] AJ.

Btigner, I. Eisele, B. Ostrik, M. Schtining, Work Function Gas Sensors - Reference Layers and Signal Analysis, Eurosensors XII Proc. 1998 T. Doll, A Neubecker, I. Eisele, D. Mutschall, E. Obermeier, Design of Metal Oxide Layers for Workfunction and Conductivity Sensors, IMCS Proceedings, 1996 R. Winter, K. Scharnagl, A Fuchs, M. Boegner, T. DolI, I. Eisele, MBE-grown Indium Oxide and Aluminum Indium Oxide Films for Room Temoperatures Gas Sensors, IMCS Proc. Peking, 1998 AV. F. G. Neizvestnyi, Zh.

80 0 2 I(m) Figure 9. Experimental Setup (left) by Hoenig and Lane 38 Showing the Electroadsorptive Effect on a 2nO Thin Film. The Conductivity Change of the Film Under Oxygen Exposure (right) Varies with the Applied Electrical Field (reprintedfrom Surface Science II, 1968). 7. THE ELECTROADSORPTIVE EFFECT IN MICRO SENSORS Twenty years later, this situation has changed. With the international Micro Systems and MEMS initiatives the ceramic metal oxide gas sensor principle41 has been transferred onto planar structures with film thickness as thin as the Debye length and electrode arrangements allowing for high electric fields even at low battery voltages.

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